Coupled finite element and network simulation for microsystem components

In the design of micromechanical systems the coupling of several distinct physical subsystems has to be considered. In the case of force balanced accelerometers, for example, the coupling of mechanics, electrostatics and external electrical networks is relevant. The numerical simulation of these coupled systems some difficulties, especially the fact, that usually no simulation tool is available, which takes all the coupling effects into account. This paper presents one approach to overcome this problem. Based on a coupling of existing powerful simulation tools, such as circuit simulators and finite element or boundary element programs, this approach results in an efficient tool for the development of microsystem components.