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Compact driver module for closed-loop control of resonant 2D-MOEMS scanners
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2014
Conference Paper
Title
Compact driver module for closed-loop control of resonant 2D-MOEMS scanners
Author(s)
Tortschanoff, A.
Kenda, A.
Sandner, T.
Kremer, M.
Frank, A.
Mainwork
Smart Systems Integration 2014
Conference
Smart Systems Integration Conference (SSI) 2014
International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components 2014
Language
English
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
