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A novel flow sensor with high time resolution based on differential pressure principle
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1999
Conference Paper
Title
A novel flow sensor with high time resolution based on differential pressure principle
Author(s)
Richter, M.
Wackerle, L.
Woias, P.
Hillerich, B.
Mainwork
MEMS '99, Twelfth IEEE International Conference on Micro Electro Mechanical Systems. Technical digest
Conference
International Conference on Micro Electro Mechanical Systems (MEMS)
DOI
10.1109/MEMSYS.1999.746783
Language
English
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS
