The impact of mass resolution on molybdenum contamination for B, P, BF, and as implantations

This paper discusses the impact of the mass resolution of an implanter on molybdenum contamination for B+, P-, BF2+, and As+ implantations by means of simulated mass spectra. In all cases, the simulations are based on experimentally identified transport mechanisms of molybdenum through the analyzer magnet. The mass spectra were simulated using the ENCOTION (ENergetic Contamination simulaTION) software, which is a powerful tool for the simulation of mass interferences and mass spectra.