Suitability of sputtered titanium dioxide layers for low-temperature measurement of oxygen concentration

In this work, we report on the suitability of three different sputtered titanium dioxide layers for oxygen detection at low temperatures. It was found that TiO2 -layers deposited by mid-frequency reactive magnetron sputtering were suitable for oxygen sensing at working temperatures as low as 200 °C. The deposition parameters have a big impact on the minimum working temperature and sensitivities of the sensors.