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HNDT solution for MEMS testing on wafer level
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2001
Conference Paper
Title
HNDT solution for MEMS testing on wafer level
Author(s)
Aswendt, P.
Schmidt, C.-D.
Zielke, D.
Schubert, S.
Mainwork
4th International Workshop on Automatic Processing of Fringe Patterns 2001. Proceedings
Conference
International Workshop on Automatic Processing of Fringe Patterns (Fringe) 2001
Language
English
Fraunhofer-Institut für Werkzeugmaschinen und Umformtechnik IWU
