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  4. Vertically integrated circuits. A key technology for future high performance systems
 
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1997
Conference Paper
Titel

Vertically integrated circuits. A key technology for future high performance systems

Author(s)
Engelhardt, M.
Hübner, H.
Jacobs, H.
Kleiner, M.
Kühn, S.
Pamler, W.
Renner, E.
Sänger, A.
Scheler, U.
Schmidt, C.
Schwarzl, S.
Weber, W.
Braun, R.
Grassl, T.
Hieber, K.
Kawala, G.
Klumpp, A.
Landesberger, C.
Popp, R.
Ramm, P.
Ruhl, G.
Weber, J.
Hauptwerk
CIP '97. 11th International Colloquium on Plasma Processes. Proceedings
Konferenz
International Colloquium on Plasma Processes (CIP) 1997
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