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Vertically integrated circuits. A key technology for future high performance systems
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1997
Conference Paper
Title
Vertically integrated circuits. A key technology for future high performance systems
Author(s)
Engelhardt, M.
Hübner, H.
Jacobs, H.
Kleiner, M.
Kühn, S.
Pamler, W.
Renner, E.
Sänger, A.
Scheler, U.
Schmidt, C.
Schwarzl, S.
Weber, W.
Braun, R.
Grassl, T.
Hieber, K.
Kawala, G.
Klumpp, A.
Landesberger, C.
Popp, R.
Ramm, P.
Ruhl, G.
Weber, J.
Mainwork
CIP '97. 11th International Colloquium on Plasma Processes. Proceedings
Conference
International Colloquium on Plasma Processes (CIP) 1997
Language
English
IFT