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  4. Vertically integrated circuits. A key technology for future high performance systems
 
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1997
Conference Paper
Title

Vertically integrated circuits. A key technology for future high performance systems

Author(s)
Engelhardt, M.
Hübner, H.
Jacobs, H.
Kleiner, M.
Kühn, S.
Pamler, W.
Renner, E.
Sänger, A.
Scheler, U.
Schmidt, C.
Schwarzl, S.
Weber, W.
Braun, R.
Grassl, T.
Hieber, K.
Kawala, G.
Klumpp, A.
Landesberger, C.
Popp, R.
Ramm, P.
Ruhl, G.
Weber, J.
Mainwork
CIP '97. 11th International Colloquium on Plasma Processes. Proceedings  
Conference
International Colloquium on Plasma Processes (CIP) 1997  
Language
English
IFT  
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