In this work we analyze the deposition process of (111)-textured Pb(Zr,Ti)O3 (PZT) thin perovskite films directly on copper-coated polymer films. Cu thin films with a thickness of about 200 nm were deposited by DC sputtering in a reel-to-reel processing system onto Kapton® HN films with a thickness of 25 m comprising an in-situ reactively sputtered dielectric TiO2-x adhesion layer. PZT thin films with a thickness of 200 to 400 nm were deposited using a pulsemodulated RF plasma jet system consisting of a hollow cathode for reactive sputtering.
