2008
Conference Paper
Titel

Investigation of etch processes of dense and porous low-k dielectrics using OES and QMS as in situ diagnostic methods
Author(s)
Zimmermann, S.
Blaschta, F.
Schaller, M.
Rülke, H.
Schulz, S.E.
Gessner, T.
Hauptwerk
Konferenz
Thumbnail Image
Language
English