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Hydrogen content and mechanical stress in glow discharge amorphous silicon
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1982
Journal Article
Title
Hydrogen content and mechanical stress in glow discharge amorphous silicon
Author(s)
Paduschek, P.
Eichinger, P.
Kristen, G.
Mitlehner, H.
Journal
Nuclear instruments and methods in physics research
Language
English
IFT
Keyword(s)
Amorphes Silizium
stress
Wasserstoffprofil
