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  4. Hydrogen content and mechanical stress in glow discharge amorphous silicon
 
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1982
Journal Article
Titel

Hydrogen content and mechanical stress in glow discharge amorphous silicon

Author(s)
Paduschek, P.
Eichinger, P.
Kristen, G.
Mitlehner, H.
Zeitschrift
Nuclear instruments and methods in physics research
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Language
English
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IFT
Tags
  • Amorphes Silizium

  • stress

  • Wasserstoffprofil

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