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Hydrogen content and mechanical stress in glow discharge amorphous silicon
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1982
Journal Article
Titel
Hydrogen content and mechanical stress in glow discharge amorphous silicon
Author(s)
Paduschek, P.
Eichinger, P.
Kristen, G.
Mitlehner, H.
Zeitschrift
Nuclear instruments and methods in physics research
Language
English
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Amorphes Silizium
stress
Wasserstoffprofil
