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  4. Hydrogen content and mechanical stress in glow discharge amorphous silicon
 
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1982
Journal Article
Title

Hydrogen content and mechanical stress in glow discharge amorphous silicon

Author(s)
Paduschek, P.
Eichinger, P.
Kristen, G.
Mitlehner, H.
Journal
Nuclear instruments and methods in physics research  
Language
English
IFT  
Keyword(s)
  • Amorphes Silizium

  • stress

  • Wasserstoffprofil

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