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  4. Highly Reliable and Low Voltage Actuated Ohmic RF MEMS Switch with Wafer Level Packaging
 
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2013
Book Article
Titel

Highly Reliable and Low Voltage Actuated Ohmic RF MEMS Switch with Wafer Level Packaging

Author(s)
Kurth, S.
Nowack, M.
Voigt, S.
Bertz, A.
Froemel, J.
Kaufmann, C.
Gessner, T.
Akiba, A.
Ikeda, K.
Hauptwerk
RF MEMS Technologies: Recent Developments
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Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS
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