2002
Conference Proceeding
Title

Plasma processing XIV. Proceedings of the International Symposium

Person Involved
Mathad, G.S.
Allendorf, M.D.
Sah, R.E.
Fraunhofer-Institut für Angewandte Festkörperphysik IAF  
Yang, M.
Corporate Author
Electrochemical Society -ECS-
Publisher
Publishing Place
Pennington, NJ
Conference
Language
English