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  4. Mastering micro-filamentation for semiconductor-metal ultrafast laser welding
 
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2021
Conference Paper
Title

Mastering micro-filamentation for semiconductor-metal ultrafast laser welding

Abstract
Ultrafast laser welding is a proven technique which enables to bond a wide variety of materials together. This technique relies on laser energy deposition at the interface between two materials. While, to date, ultrafast laser welding has been demonstrated in numerous material configurations such as glass-glass, glass-semiconductor, glass-metal, polymer-polymer, and ceramic-ceramic, it has no equivalent for the semiconductor-metal configuration so far, which would be particularly interesting for applications in microelectronics.
Author(s)
Chambonneau, M.
Li, Q.
Fedorov, V.Y.
Blothe, M.
Tzortzakis, S.
Nolte, S.
Mainwork
Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference, CLEO/Europe-EQEC 2021  
Conference
Conference on Lasers and Electro-Optics Europe (CLEO) 2021  
European Quantum Electronics Conference (Europe EQEC) 2021  
DOI
10.1109/CLEO/Europe-EQEC52157.2021.9541622
Language
English
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
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