2006
Conference Paper
Title

Simulation of ion beam direct structuring for 3D nanoimprint template fabrication

Author(s)
Platzgummer, E.
Biedermann, A.
Langfischer, H.
Eder-Kapl, S.
Kuemmel, M.
Cernusca, S.
Loeschner, H.
Lehrer, C.
Frey, L.
Lugstein, A.
Bertagnolli, E.
Mainwork
Conference
DOI
Language
English