Comparative analysis of multi-mass high precision vibratory MEMS gyroscopes

This paper reports comparative analysis of multi-mass high precision vibratory MEMS gyroscopes developed by JSC "GYROOPTICS" (Russia), integrated with a mixed-signal ASIC integrated results of single package. The MEMS gyroscopes have been designed by JSC "GYROOPTICS" Russia, St. Petersburg, and fabricated in cooperation with TUC, memsfab, FhG ENAS (Chemnitz). The advanced fabrication technology of the complicated encapsulated structure and the key gyroscope parameters within the temperature range from -60 °C to +60 °C are represented. Dependencies of main gyroscope parameters on technological tolerance, results of vibration tests and a long-time stability and comparison of two types of gyroscope designs are shown.