2002
Conference Paper
Title

Electrically controlled metal oxide gas sensor designed with PROSA-CHEM

Abstract
In this paper, an electrically controlled metal oxide gas sensor designed with PROSA-CHEM is introduced, specified and realized. The simulator PROSA-CHEM is explained and its function is verified by using realistic sensor data. On the practical side, a first device was fabricated and first measurements were done and compared with the simulation. It is found that the gas sensitivity and selectivity of the sensor can be altered by electric fields.
Author(s)
Scheinert, M.
Doll, T.
Wöllenstein, J.  
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Dalin, J.
Frerichs, H.P.
Verhoeven, H.
Lehmann, M.
Mainwork
Conference
DOI
Language
English