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Plasma activated atmospheric pressure chemical vapor deposition
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2013
Conference Paper
Title
Plasma activated atmospheric pressure chemical vapor deposition
Author(s)
Thomas, M.
Mainwork
OTTI-Seminar CVD-Beschichtungstechnologien
Conference
Seminar CVD-Beschichtungstechnologien 2013
Language
English
Fraunhofer-Institut für Schicht- und Oberflächentechnik IST
