2016
Master Thesis
Title

Investigation of the influence of the sample topography on the measurement uncertainty of a scanning white light interferometer

Thesis Note
Karlsruhe, Inst. für Technologie (KIT), Master Thesis, 2016
Author(s)
Adapa, Bharath Reddy
Person Involved
Skupsch, Christoph
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Lemmer, Uli
Karlsruhe Institute of Technology
Publishing Place
Karlsruhe
File(s)
Rights
Use according to copyright law
DOI
Language
English