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Plasma-activated high-rate electron beam evaporation for coating metal strips
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1993
Journal Article
Title
Plasma-activated high-rate electron beam evaporation for coating metal strips
Author(s)
Schiller, S.
Goedicke, K.
Metzner, C.
Journal
Materials Science and Engineering, A. Structural materials, properties, microstructure and processing
DOI
10.1016/0921-5093(93)90780-I
Language
English
Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP
