Piezoelektrischer Drehtisch mit hoher Winkelauflösung

With increasing miniaturization of structural treatment and examination the accuracy requirements of positioning systems are rising. The paper presents a piezoelectrical driven rotation stage for step by step rotary motions with an angular resolution in the range of arc seconds. The driving components are piezoelectric actuators, which are controlled by a voltage up to 200 V. For that maximum control voltage the deformation of piezoelectric actuators is 28 mu m. That linear motion is transformed and transmitted by elastic hinges in a rotation step of 1,7 angle minutes. The angular resolution of the rotation stage is depending on the stability of the control voltage, we measured 0,025 seconds of arc. The step size is adjustable between the angular resolution and the mentioned maximum step; the range of rotation is free. On the strength of motion generation by means of piezoelectric actuators and the transmission by elastic hinges the rotation stage is especially suitable for precise pos itioning of objects for treatment, handling and examination and likewise for adjustment and quality control.