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Control of organic contamination in CMOS manufacturing
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2001
Conference Paper
Title
Control of organic contamination in CMOS manufacturing
Author(s)
Bügler, J.
Frickinger, J.
Zielonka, G.
Pfitzner, L.
Ryssel, H.
Schottler, M.
Mainwork
In-line characterization, yield, reliability, and failure analysis in microelectronic manufacturing
Conference
Conference on In-Line Characterization, Yield, Reliability, and Failure Analysis in Microelectronic Manufacturing 2001
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
