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Stress Measurement in Thin Multilayer Systems by Stress Relief
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2013
Conference Paper
Title
Stress Measurement in Thin Multilayer Systems by Stress Relief
Author(s)
Vogel, D.
Auerswald, E.
Rzepka, Sven
Michel, Bernd
Mainwork
Micro materials, nano materials for automotives. Proceedings MicroCar 2013
Conference
MicroCar Conference 2013
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
