1999
Conference Paper
Title

Clamping of piezoelectic thin films on substrates: influence of the effective piezoelectric modulus D33

Author(s)
Steinhausen, R.
Hauke, T.
Seifert, S.
Mueller, V.
Beige, H.
Seifert, S.
Loebmann, P.
Sporn, D.
Mainwork
Conference
Language
English