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  4. Combined MEMS Inertial Sensors for IMU Applications
 
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2009
Conference Paper
Title

Combined MEMS Inertial Sensors for IMU Applications

Author(s)
Merz, P.
Reimer, K.
Weiß, M.
Schwarzelbach, O.
Schröder, C.
Giambastiani, A.
Rocchi, A.
Heller, M.
Mainwork
MikroSystemTechnik Kongress 2009. Proceedings. CD-ROM  
Conference
MikroSystemTechnik Kongress 2009  
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT  
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