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Evaluation of quality of mechanical components of MEMS pressure sensors
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2007
Conference Paper
Title
Evaluation of quality of mechanical components of MEMS pressure sensors
Author(s)
Ekwinski, G.
Trieu, H.-K.
Rymuza, Z.
Mainwork
Microprocesses and nanotechnology 2007. Digest of papers
Conference
International Microprocesses and Nanotechnology Conference (MNC) 2007
DOI
10.1109/IMNC.2007.4456260
Language
English
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS
