2010
Conference Paper
Title

Influence of substrate finish and thin film roughness on the optical performance of Mo/Si multilayers

Abstract
The angle resolved scattering of Mo/Si multilayers at 13.5 nm is analyzed to separate the influence of substrate finish and intrinsic thin film roughening on the optical properties of Mo/Si multilayers.
Author(s)
Trost, M.
Schröder, S.
Feigl, T.
Duparre, A.
Mainwork
Conference
Language
English