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Micromirrors for a miniaturized endoscopic laser scanning microscope
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1999
Journal Article
Title
Micromirrors for a miniaturized endoscopic laser scanning microscope
Author(s)
Hofmann, U.
Mühlmann, S.
Dörschel, K.
Journal
Medical & biological engineering & computing
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
