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MicroDAC deformation measurement on microelectronic products
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1997
Conference Paper
Title
MicroDAC deformation measurement on microelectronic products
Author(s)
Vogel, D.
Bombach, C.
Großer, V.
Michel, B.
Mainwork
Fringe '97. Proceedings of the 3rd International Workshop on Automatic Processing of Fringe Patterns
Conference
International Workshop on Automatic Processing of Fringe Patterns (Fringe) 1997
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
