Compact High-Speed Spectrometers Based on MEMS Devices with Large Amplitude In-Plane Actuators

At present most spectrometers, in particular for wavelengths longer than the VIS, are comparatively large, stationary and expensive. With the advent of micro-electro-mechanical systems (MEMS), it became possible to build pocket-sized spectrometers for various spectral ranges, including the near-IR or mid-IR. These systems are highly rugged and can measure spectral changes at ms time resolution or to co-add several hundreds of scans to one spectrum achieving adequate signal-to-noise ratios. Two spectrometer systems a Czerny-Turner type scanning monochromator and a FT-IR spectrometer both based on a micromechanical scanning mirror technology with in plane electrostatic actuation are presented.