Correlative extreme ultraviolet, visible, infrared, and fluorescence microscopy in a single lensless imaging setup

Correlative imaging allows the investigation of biological samples under various aspects. We are working towards a correlated extreme ultraviolet (EUV), infrared (IR) and visible (VIS) fluorescence microscope in a single integrated setup. With ptychography, which is a lensless imaging technique, quantitative amplitude and phase information are obtained. EUV ptychography provides resolution in the nanometer scale and an excellent element contrast, but suffers from low throughput due to limited coherent photon flux. Using longer wavelengths such as UV/visible and Near-IR enables high-speed imaging with sub micrometer resolution. Further, the combination with fluorescence detection adds functional contrast with micrometer-scale resolution. Here, we demonstrate in a proof-of-concept experiment correlated ptychography-fluorescence microscopy in the visible range. By using the reconstructed beam from the ptychography measurement the fluorescence scanning map can be deconvolved, which significantly improves the resolution.