Progress in the characterisation of laser-fired contacts

To extend the field of application for the laser-fired contacts (LFC), a more detailed knowledge of the contact formation and property is needed. Therefore several examinations have been carried out including secondary ion mass spectroscopy (SIMS), scanning and transmission electron microscopy (SEM and TEM) as well as energy dispersive x-ray analysis (EDX). The results show in continuation to previous results the reduced metal semiconductor contact area compared to the area threatened by laser influence. A depth analysis of the aluminium alloyed into the silicon increase the insight of the alloying process of aluminium during laser firing.