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Smart power with SIMOX for dielectric isolation: Processes and applications
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1993
Conference Paper
Title
Smart power with SIMOX for dielectric isolation: Processes and applications
Author(s)
Vogt, Holger
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS
Mainwork
1st Seminar Smart-Power-Technologies and Applications 1993
Conference
Seminar Smart-Power-Technologies and Applications 1993
Language
English
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS
