Decreasing the actuation voltage in electrowetting on dielectric with thin and micro-structured dielectric

This work presents the analysis of the minimum actuation voltage Vmin for droplet actuation with electrowetting on dielectric (EWOD). First, the fundamentals of electrowetting are described. In the second chapter, the impact on the actuation voltage in EWOD is shown by a dielectric deposited with atomic layer deposition (ALD) and micro-structured surface. In the last part, results of a simulation with COMSOL Multiphysics® are presented to verify the hypothesis and a short discussion about the results is given.