Fabrication of Bragg grating sensors in UV-NIL structured Ormocer waveguides

We report on the fabrication and characterization of Bragg gratings in UV-NIL structured Ormocer hybrid polymer rib-type waveguides using phase mask technology. The influence of fabrication parameters such as the applied laser fluence during the inscription process and the grating's length on the spectral behavior of the waveguide Bragg gratings was experimentally determined and compared to numerical simulations and calculations. To investigate potential sensor applications, the sensitivity of the thus fabricated optical devices towards refractive index changes of the gratings' surrounding (qualification for bio- and chemical sensing) as well as the sensitivity towards temperature and relative humidity were determined.