Microfabricated actuator with moving permanent magnet

A microactuator is presented, which uses electromagnetic force generation within micromachined silicon devices. A rare earth permanent magnet is bonded on a movable micromachined silicon plate suspended by thin silicon beams. A monolithically integrated planar coil is used to generate a magnetic field which forces the magnet to move vertically. Using a magnet with a dimension of 1.5 x 1.5 x 1.0 cbmm and a 17-turn coil driven with 300 mA, a static elevation of 70 mym has been achieved. The actuator concept offers a variety of application specific design possibilities. High, long range forces can be generated in order to realize devices with large deflections.