English
Deutsch
Log In
Log in with Fraunhofer Smartcard
Password Login
Have you forgotten your password?
Research Outputs
Fundings & Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Artikel
Microstructure of BN:C films deposited on Si substrates by reactive magnetron sputtering from a B4C target
Details
Full
Export
Statistics
Options
Show all metadata (technical view)
1994
Book Article
Title
Microstructure of BN:C films deposited on Si substrates by reactive magnetron sputtering from a B4C target
Author(s)
Johansson, M.
Daaud, S.
Bewilogua, K.
Lüthje, H.
Hultmann, L.
Mainwork
ICMTF '94. Conference on Metallurgical Coatings and Thin Films. Proceedings
Language
English
Fraunhofer-Institut für Schicht- und Oberflächentechnik IST