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  4. Fabrication and characterization of a force coupled sensor-actuator system for adjustable resonant low frequency vibration detection
 
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2008
Journal Article
Title

Fabrication and characterization of a force coupled sensor-actuator system for adjustable resonant low frequency vibration detection

Author(s)
Forke, R.
Scheibner, D.
Hiller, K.
Gessner, T.
Doetzel, W.
Mehner, J.
Journal
Sensors and Actuators. A  
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS  
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM  
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