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Fabrication and characterization of a force coupled sensor-actuator system for adjustable resonant low frequency vibration detection
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2008
Journal Article
Title
Fabrication and characterization of a force coupled sensor-actuator system for adjustable resonant low frequency vibration detection
Author(s)
Forke, R.
Scheibner, D.
Hiller, K.
Gessner, T.
Doetzel, W.
Mehner, J.
Journal
Sensors and Actuators. A
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM