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CMOS-compatible capacitive high temperature pressure sensors
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2000
Journal Article
Title
CMOS-compatible capacitive high temperature pressure sensors
Author(s)
Kasten, K.
Amelung, J.
Mokwa, W.
Journal
Sensors and Actuators. A
DOI
10.1016/S0924-4247(00)00385-X
Language
English
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS
