English
Deutsch
Log In
Log in with Fraunhofer Smartcard
Password Login
Research Outputs
Fundings & Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Artikel
Investigations on the topology of structures milled and etched by focused ion beams
Details
Full
Export
Statistics
Options
Show all metadata (technical view)
1996
Journal Article
Title
Investigations on the topology of structures milled and etched by focused ion beams
Author(s)
Lipp, S.
Frey, L.
Journal
Journal of vacuum science and technology B. Microelectronics and nanometer structures
DOI
10.1116/1.588630
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
