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Microprobe analysis of Pt films deposited by beam induced reaction
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1998
Journal Article
Title
Microprobe analysis of Pt films deposited by beam induced reaction
Author(s)
Park, Y.K.
Takai, M.
Lehrer, C.
Frey, L.
Ryssel, H.
Journal
Japanese Journal of Applied Physics. Part 1, Regular papers, short notes and review papers
DOI
10.1143/JJAP.37.7042
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
