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Thermophysical characterisation of sub-µm polymer layers by nano-TMA/TGA/DVS
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2007
Conference Paper
Title
Thermophysical characterisation of sub-µm polymer layers by nano-TMA/TGA/DVS
Author(s)
Kahle, O.
Uhlig, C.
Bauer, M.
Mainwork
MicroNanoReliability 2007, 1st World Congress MicroNanoReliability
Conference
World Congress MicroNanoReliability 2007
International Congress on Microreliability and Nanoreliability in Key Technology Applications (MNR) 2007
Language
English
EPC
