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Assessment of the cleanroom suitability of material pairings for use in cleanroom applications
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2007
Conference Paper
Title
Assessment of the cleanroom suitability of material pairings for use in cleanroom applications
Author(s)
Gommel, Udo
Mainwork
MiNaT - Internationale Fachmesse für Feinwerktechnik, Ultrapräzision, Micro- und Nanotechnologien. CD-ROM
Conference
Internationale Fachmesse für Feinwerktechnik, Ultrapräzision, Micro- und Nanotechnologien (MiNat) 2007
Language
English
Fraunhofer-Institut für Produktionstechnik und Automatisierung IPA
Keyword(s)
cleanroom
cleanroom Application
Reinraumanwendung
sustainability
Reinraum
