2005
Conference Paper
Title

Implantation and annealing of aluminum in 4H silicon carbide

Other Title
Implantation und Ausheilen von Aluminium in 4H Siliciumcarbid
Author(s)
Rambach, M.
Frey, L.
Bauer, A.J.
Ryssel, H.
Mainwork
Conference
DOI
Language
English