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Effect of ion angular distribution on microloading in oxygen reactive ion etching of submicrometer polymer trenches
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1993
Journal Article
Title
Effect of ion angular distribution on microloading in oxygen reactive ion etching of submicrometer polymer trenches
Author(s)
Janes, J.
Pilz, W.
Journal
Journal of applied physics
DOI
10.1063/1.355341
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
