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Process development for smart systems integration in MEMS
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2009
Journal Article
Title
Process development for smart systems integration in MEMS
Author(s)
Ecke, Ramona
Frömel, J.
Schulz, Stefan E.
Wiemer, Maik
Geßner, Thomas
Journal
MST News
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
