The deposition of multilayer films on plastic substrates by reactive pulse magnetron sputtering

In this experiment, anti-reflective (AR) coating composed of Si3N4 and SiO2 films were deposited on ophthalmic plastic lens by high rate reactive pulse magnetron sputtering (R-PMS) and the sputter conditions were investigated in order to get the AR coatings with good mechanical performances. The Ar flow rate in the deposition of each layer was changed to control film stress and the film with a good adhesion performance at cross cut tape test was obtained. In addition, the working pressure was optimized to increase the film density and sufficient water-resistance and heat-resistance as well as an excellent adhesion were obtained. It was shown that multilayer films with good mechanical performances could be deposited on plastic substrates at high rate (~1nm/sec) by the R-PMS.