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  4. Combination of FE simulation and micro deformation measurements - A promising approach to consider reliability aspects right from the start
 
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2010
Conference Paper
Title

Combination of FE simulation and micro deformation measurements - A promising approach to consider reliability aspects right from the start

Author(s)
Sommer, J.-P.
Michel, Bernd  
Brämer, Birgit  
Kugler, A.
Rank, H.
Mainwork
Smart systems integration 2010. 4th European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components. CD-ROM  
Conference
European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components 2010  
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS  
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