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Fabrication of micro-optical components by high-precision embossing
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2000
Conference Paper
Title
Fabrication of micro-optical components by high-precision embossing
Author(s)
Otto, T.
Schubert, A.
Böhm, J.
Gessner, T.
Mainwork
Micromachining Technology for Micro-Optics
Conference
Conference "Micromachining Technology for Micro-Optics" 2000
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
