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  4. Preparation and characterization of carbonate terminated polycrystalline Al2O3/Al films
 
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2005
Journal Article
Title

Preparation and characterization of carbonate terminated polycrystalline Al2O3/Al films

Author(s)
Tornow, C.
Noeske, P.-L.M.
Dieckhoff, S.
Wilken, R.
Gärtner, K.
Journal
Applied surface science  
DOI
10.1016/j.apsusc.2005.03.176
Language
English
Fraunhofer-Institut für Fertigungstechnik und Angewandte Materialforschung IFAM  
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