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Evaluation of ORMOCERs for microelectronics applications
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1997
Conference Paper
Title
Evaluation of ORMOCERs for microelectronics applications
Author(s)
Dabek, A.
Popall, M.
Olsowski, B.
Reichl, H.
Mainwork
Micro Materials. Micro Mat '97. Proceedings
Conference
Micro Materials (Micro Mat) 1997
Language
English
Fraunhofer-Institut für Silicatforschung ISC
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
